Module 1 - Afternoon

Which standard(s) include guidelines for the system design of Ultra-Pure Water (UPW)?

• ASTM D5127

• SEMI F63

• Both

• None of them

Which of the following parameters are specified in both ASTM D5127 and SEMI F63? You can select more than 1.

• TOC (Total Organic Carbon)

• COD (Chemical Oxygen Demand)

• BOD (Biochemical Oxygen Demand)

• DO (Dissolved Oxygen)

• All of them

Which statement correctly describes ultrapure water?

• Very low conductivity but very high resistivity

• Very high conductivity but very low resistivity

• Very low values for both conductivity and resistivity

• Very high values for both conductivity and resistivity

How many types of electronic-grade water are defined in ASTM D5127?

• 4

• 5

• 6

• 7

In ASTM D5127, electronic-grade water classifications are based on what criterion?

• Size of the company

• Size of the silicon wafer

• Linewidth (feature size in semiconductor manufacturing)

• Production capacity