Which etching process has the best directionality?
ECE411_Etching

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Science
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University
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Medium

Sameh Ibrahim
Used 2+ times
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6 questions
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1.
MULTIPLE CHOICE QUESTION
0 sec • 1 pt
Wet Etching
Plasma Etching
RIE Etching
Ion Sputtering
2.
MULTIPLE CHOICE QUESTION
0 sec • 1 pt
Which etching process has the best selectivity?
Wet Etching
Plasma Etching
RIE Etching
Ion Sputtering
3.
MULTIPLE CHOICE QUESTION
0 sec • 1 pt
Different etch rates in different directions is called
Selectivity
Directionality
Preferentiality
Speed
4.
MULTIPLE CHOICE QUESTION
1 min • 1 pt
If the etch rate of a certain etchant in Silicon is 10 nm/min and in Silicon dioxide is 100 nm/min, then the selectivity of this Silicon dioxide etchant to Silicon is
10
0.1
1
5.
MULTIPLE CHOICE QUESTION
0 sec • 1 pt
Which dry etching process has more free radicals than charged ions?
Ion Sputtering
Plasma Etching
RIE Etching
6.
MULTIPLE CHOICE QUESTION
1 min • 1 pt
If the etch rate of a certain etchant in Silicon is 10 nm/min and in Silicon dioxide is 100 nm/min, then the selectivity of this Silicon dioxide etchant to Silicon is
10
0.1
1
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