ECE411_Photolithography

What controls the thickness of the photoresist?

• The type of the phtoresist.

• The speed of rotation.

• The direction of rotation.

• The duration of coating.

Which projection technique is used in modern technolgies?

• Proximity

• Contact

• Projection

Which type of ultraviolet light is used in modern semiconductors?

• UV

• DUV

• EUV

Adding dog ears is a technique used in which resolution enhancement technique?

• Phase Shift Masking (PSM)

• Optical Proximity Correction (OPC)

• Double Patterning Lithography (DPL)

• Immersion

Which lithography is used for 3D patterns?

• Photolithography

• Ion beam lithography

• Electron beam lithography

• X-ray lithography