MEMS - Energy Domains, Electrical and Mechanical Concepts

• MEMS Accelerometers combine ------------------ to sense motion.

• • mechanical and thermal domains

• • mechanical and acoustic domains

• • mechanical and electrical domains

• mechanical and chemical domains

• MEMS Microphones use -------------------------- to detect sound.

• • acoustic and electrical domains

• • acoustic and mechanical domains

• • acoustic domains

• • acoustic and thermal domains

• Lab-on-a-Chip Devices Integrate ------------------------ for biochemical analysis.

• fluidic, thermal and mechanical domains

• • fluidic, thermal and chemical domains

• • fluidic, thermal and electrical domains

• chemical and electrical domains

It provides electrical connectivity within the MEMS device.

• Microelectronic circuits

• Interconnects

• Electrodes

• Conductive Paths

Beams and Cantilevers sense ----------------------.

• displacement, force or vibration

• restoring force

• electrostatic force

• inertial force

• MEMS accelerometers use a ---------- to detect motion and -------------- to measure displacement.

• • proof mass, diaphragm

• • capacitive electrodes, proof mass

• • proof mass, capacitive electrodes

• • capacitive electrodes, diaphragm

• MEMS microphones use a ----------- to detect sound waves and ------------ to convert them into signals.

• • diaphragm, electrodes

• • electrodes, diaphragm

• micro-mirrors, diaphragm

• micro-mirrors, electrodes

• Optical MEMS use ------------- and ------------ for precise light modulation.

• proof mass, electrodes

• • electrodes, micro-mirrors

• • diaphragm, electrodes

• micro-mirrors, electrodes

Integration of Electrical and Mechanical Components enables MEMS devices to achieve ----------------------- in various applications.

• high performance, compact size and multifunctionality

• high performance

• compact size

• multifunctionality

Channels and Cavities ----------------.

• • involves the control and manipulation of liquids or gases in microscale systems.

• control fluid or gas flow in microfluidic MEMS devices.

• • involves chemical reactions in MEMS devices.

• • direct fluid or gas flow in microfluidic MEMS devices.