EMA4307 Quiz 3

This equation represents the __?__ of atoms impinging on a __?__ surface per unit area of surface per unit time.

Answer explanation

For the sticking coefficient 𝛼=0, the surface is...

• perfectly reflective

• perfectly adsorbing

Answer explanation

For the sticking coefficient 𝛼=1, the surface is...

• perfectly reflective

• perfectly adsorbing

Answer explanation

The Impingement rate is the __(1)__ rate at which gas molecules immediately above a solid can strike the surface.

Impingement rate __(2)__ concentration gradients

• (1) maximum

• (1) minimum

• (2) does not take into account

• (2) takes into account

Answer explanation

For evaporation of a surface to proceed row by row along __?__, as the __?__ atoms evaporate more easily. (Same Term)

Answer explanation

In Active Gas Corrosion, Rates generally increase __?__ with increasing temperature.

The __?__ of the steps will control the overall rate of the process.

Answer explanation

This is the resulting Ti etching rate equation assuming what kind of control? (AGC)

• Mixed Control (two series both affect the overall rate)

• Diffusion Control (diffusion rate limiting step)

• Surface Reaction Control (surface rxn is slowest step)

Answer explanation

What kind of control is the following graph displaying? (AGC)

• Mixed Control (two series both affect the overall rate)

• Diffusion Control (diffusion rate limiting step)

• Surface Reaction Control (surface rxn is slowest step)

Answer explanation

What kind of control is the following graph displaying? (AGC)

• Mixed Control (two series both affect the overall rate)

• Diffusion Control (diffusion rate limiting step)

• Surface Reaction Control (surface rxn is slowest step)

Answer explanation

What kind of control is the following graph displaying? (AGC)

• Mixed Control (two series both affect the overall rate)

• Diffusion Control (diffusion rate limiting step)

• Surface Reaction Control (surface rxn is slowest step)

Answer explanation