FD integration system comparison

關於故障檢測集成系統 (FDIS) 的目標，以下哪項陳述是不正確的？

• Integrate all Fault Detection (FD) applications into single platform.

• Including Unified Variable Analysis (UVA) management or full trace analytics

• Retire Enterprise Equipment Engineering (E3)

• Integration of workflows and processes

為了實現統一變量分析（UVA）管理功能，(FDIS)部署了以下哪些功能？ （多選）

• UVA Search

• UVA chart display

• Alarm Rule Simulation

• Limit change workflow

FDIS 的正確別名是什麼？

• Fault Detection Integration System

• FDC web Integration System

• FD Integrated System

• Fault Detection Image System

對於Full Trace Analytics 排除列表，哪種描述是正確的？

• Process type tied to non-processing chamber.

• Trace that are not consistent from wafer within the same process

• Tunable parameters

• Process type with no expected SVID data collection

• All of them

對於Full Trace Analytics 排除列表，哪種描述是正確的？

• Coverage on Critical windows only

• Does not have OCAP interdiction.

• All sensors set in E3 FDC process type.

FDC UVA pattern何者為正確7 種chart type？

• Stepped

• Cyclical

• PM/ CM Drifting

• Steady

• All of them

關於故障檢測集成系統 (FDIS) 的目標，以下哪項陳述是不正確的？

• FDIS stands for Fault Detection Integration System

• Current Full trace analytics is including RDA, Metro

• The current UVA limit optimization calculation has pattern recognition.

• 
  The trace overlay in FDIS has customizable chart splitting and legend selection.

Trace Overlay multiple comparison 最多可以比對多少 group ?

• 1

• 2

• 3

Trace Mining  算法功能增強了哪個部分?

• Full Trace Analytics

• Cross site analysis& UVA window

• Multiple comparison

EMA 比較於 Trace Overlay & Mining系統的優點是?

• Multiple comparison conditions can be set at one time.

• Need setup Sensor Categorization

• EMA has a complete function and can view the differences between rata data & sensor card.