XT CT/WS Mentor week post test

On XT, which unit does have nothing to do with IH facilities? (can be multiple)

• LCWC

• MCWC

• WICC

• WISC

Which one is wrong with the full name?

• LCWC = Lens Cooling Water Cabinet

• RCWC = Rough Cooling Water Cabinet

• WVCC = Wet Vacuum Control Cabinet

• WISC = Wet Imaging Saving Cabinet

Which one is wrong?

• CA (Clean Air) is coming from ACC (Air Control Cabinet)

• Air in subfab will be extracted to ACC

• ILCC (In Line Cleaning Cabinet) is used to clean the WVAC line in WS.

• LCWC has extra temp sensors and heaters

What is new cabinets from NXT? (can be multiple)

• AERC = Auxiliary Electrical Remote Cabinet

• XCHAC = eXtreme Clean Humidified Air Cabinet

• UPWC = Ultra Pure Water Cabinet

• MDC = Main Distribution Cabinet

• All is new from NXT

Math Names for IH MK3

• A: LWS

  B: LWE

  C: GWS

  D: NWE

  E: AK

  F: AKE

• A: LWS

  B: WVOE

  C:SPE

  D:GWS

  E: AKE

  F:AK

• A: LWS

  B: WVOE

  C: GWS

  D: SPE

  E: AK

  F: AKE

Which description is incorrect? (can be multiple)

• XT3 type RS uses both LCW and RCW

• PCW is routed inside the exposure unit to condition the sub modules

• Exhaust system is used to remove particles only from the submodules inside the exposure unit

• All Answer is correct

Which temp. sensor is used during the stabilization of the lens?

• Lens temp. sensor   

• MF temp. sensor

• LCW manifold temp. sensor  

• MCW manifold temp. sensor

Why do we need heaters in Immersion Hood?

• Because there is temp. decrease due to WVAC.

• Because UPW slowly decreases IH temp.

• Because Wafer Stage has them, so IH needs to have as well

• None of the above is answer. The answer is to remove bubbles

What is this cabinet?

Which statement is true? (can be multiple)

• With XCDA, XCHA is made

• All Answer is correct

• The Safety Handling Box or EMO is not serial-linked   

• XCDA becomes XCHA in XCHAC, NXT.