QUIZ FABRICATION OF MICROELECTROMECHANICAL devices

What is Micromechanical Device

• is a product that is purely mechanical in nature and has dimensions between a few millimeters

• soft lithography techniques that are capable of top-down manufacture

• method that produces complex three-dimensional structures through additive manufacturing

• An anisotropic-etching step removes the oxide only at the bottom of the trench

Which MEMS device that fit this description “products that are purely mechanical in nature and have dimensions between atomic length scales and a few millimeters"?

• Micromechanical devices

• Microelectromechanical devices

• microelectromechanical system

• Microelectro devices

Which MEMS device that fit this description ” products that combine mechanical and electrical or electronic elements at very small length scales”?(

• Micromechanical devices

• Microelectromechanical devices

• Microelectro devices

• Microelectromechanical system

Which MEMS device that fit this description “semiconductor-based devices that often have the common characteristics associated with extreme miniaturization and use electrical principles in their design”(

• Micromechanical devices

• Microelectromechanical devices

• Microelectromechanical system

• Microelectromechanical devices

Which MEMS device that fit this description “microelectromechanical devices that also incorporate an integrated electrical system in one product”

• Microelectromechanical system

• Microelectro devices

• microelectromechanical system

• Microelectromechanical devices

MEMS is the acronym for?

• Micromechanical devices

• microelectromechanical system

• Microelectro devices

• Microelectromechanical devices

Tell me a Micromachining Methods

Which micromachining methods that uses etches on single-crystal silicon?(

IGA is the german acronym for?

What are the two more newer and modern form of LIGA?